The Opta X300 is purpose-built for high precsion, double-side deposition to support “the most demanding multilayer applications,” said Guideo Ueberreiter, vice president of semiconductor strategy at Von Ardenne.
The rotary disk coating system is designed for sub-nm precision deposition on and is purpose-built for electrical and optical layers for memory, photonics and sensor devices.
The Opta X300 will be installed at the company’s new ISO 5 cleanroom in its Technology and Applications Center in Dresden, Germany. The cleanroom is designed for semiconductor, optical and space applications. It s extreme ultraviolet (EUV) -ready and has 200m2 of ISO 5 (Class 100) assembly and test bays with airborne molecular contamination control (AMC) and 400m2 of ISO 7 cleanroom manufacturing space.
The Dresden facility serves customers, allowing them to test, sample and co-develop deposition processes with access to the company’s engineering and materials science expertise.
Von Ardenne is also introducing its portfolio of semiconductor tools, co-developed materials and custom refurbishment and upgrade services to the US, for when legacy tools falls short or off-the-shelf solutions can’t meet emerging needs. US fabs need more than tool suppliers, they need engineering partners who understand both the equipment and the materials science behind next-generation devices,” said Michael Schneider, vice president of semiconductor and precision optics at Von Ardenne.
“We’re bringing that integrated expertise to the US market—helping customers unlock new levels of performance, customisation and yield.”, added Ueberreiter.
