Comments on: HBA lithography tool ‘outstrips electron beam capabilities’ https://www.electronicsweekly.com/news/research-news/process-rd/hba-lithography-tool-outstrips-electron-beam-capabilities-2025-10/ Fri, 07 Nov 2025 14:18:52 +0000 hourly 1 https://wordpress.org/?v=6.8.1 https://www.electronicsweekly.com/wp-content/themes/ew/images/logo.gif Electronics Weekly https://www.electronicsweekly.com/news/research-news/process-rd/hba-lithography-tool-outstrips-electron-beam-capabilities-2025-10/ 125 75 By: Mike Bryant https://www.electronicsweekly.com/news/research-news/process-rd/hba-lithography-tool-outstrips-electron-beam-capabilities-2025-10/#comment-1538461 Fri, 07 Nov 2025 14:18:52 +0000 https://www.electronicsweekly.com/?p=882119#comment-1538461 I assume they are referring to the EU project MAGIC and its successors from Mapper and IMS. Great idea which we looked at several times, definitely worked well (better than 22nm 10 years ago !) with some specialist European developed resists, and it even came up in the early IPCEI meetings I attended.

All it needed was someone to take it up for specialist low/mid volume manufacture. And guess what ?

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